Following is a list of attachments available for Franklin stages:
Wafer Attachments-Side Loader Paddle with Rotator:
Model # Description.
WSR-600 Fits stage model # 600 for 4",5", and 6" wafers.
WSR-800 Fits stage model # 800 for 6" and 8" wafers.
Rotators:
Model # Description.
ROT-1200 Rotator for 12" wafers; fits stage model # 1200R
Front load paddles:
Model # Description.
WF-600-456 Fits stage # 600 for 4", 5", and 6" wafers.
WF-800-68 Fits stage # 800 for 6", and 8" wafers.
Side Load Wafer Paddles:
Model # Description.
SF-600-456 Fits stage # 600 for 4", 5" and 6" wafers.
SF-800-68 Fits stage # 800 for 6", and 8" wafers.
Side Load Mask Paddles:
Model # Description.
SM-600-4 For # 600T stage with 4" mask cutout.
SM-600-5 For # 600T stage with 5" mask cutout.
SM 600-6 For # 600T stage with 6" mask cutout.
SM-800-4 For # 800T stage with 4" mask cutout.
SM-800-5 For # 800T stage with 5" mask cutout.
SM-800-6 For # 800T stage with 6" mask cutout.
SM-800-7 For # 800T stage with 7" mask cutout.
SM-800-8 For # 800T stage with 8" mask cutout.
Front Load Mask Paddles:
Model # Description.
FM-600-4 For # 600T stage with 4" mask cutout.
FM-600-5 For # 600T stage with 5" mask cutout.
FM-600-6 For # 600T stage with 6" mask cutout.
FM-800-4 For # 800T stage with 4" mask cutout.
FM-800-5 For # 800T stage with 5" mask cutout.
FM-800-6 For # 800T stage with 6" mask cutout.
FM-800-7 For # 800T stage with 7" mask cutout.
FM-800-8 For # 800T stage with 8" mask cutout.
Plastic Guide Rails for Paddles:
Model # Description.
GP-600-S Side load rails for model # 600 stage.
GP-600-F Front load rails for model # 600 stage.
GP-800-F Front load rails for model # 800 stage.
GP-800-S Side load rails for model # 800 stage.